Technical Parameters：

wProduct dimension : 400mm×300mm×700mm

w (length, width, height)

wAlignment method: Search the edge/Mark point

wPower: 220V single-phase electric

wCycle Time： 1s

wOutput ≥3600pcs

wTest overall accuracy: ±3um

wUptime≥99.9%

wMissing detection rate ≤0.1%

wMisjudge rage ≤2%

Project Illustration：

wCell demission measuring: Through four cameras

at the edge, locate the whole silicon slice and    

calculate the length of four sides, and then get   

the length and width of the silicon slice. 

Detect for the overall shift of the pattern: Through four cameras, measure the distance between the etching line and the edge of the silicon slice, and angle. Calculate the overall shift between the etching picture and the silicon slice, including (X, Y, T three directions)

wPitch tolerance of the Mark points.

wDetection for the width of the slots, lines pitch/PT value control.